• DocumentCode
    1668904
  • Title

    Phase noise of high Q silicon nitride nanomechanical resonators

  • Author

    Fong, King Y. ; Pernice, Wolfram H P ; Tang, Hong X.

  • Author_Institution
    Dept. of Electr. Eng., Yale Univ., New Haven, CT, USA
  • fYear
    2012
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We study noise characteristics of high Q silicon nitride nanomechanical resonators integrated in a nanophotonic circuit. Quality factor up to 2.2 million is measured and an intrinsic frequency noise spectrum with kBT/f dependence is observed.
  • Keywords
    Q-factor; integrated optics; micromechanical resonators; nanophotonics; optical resonators; phase noise; silicon compounds; SiN; high Q silicon nitride; intrinsic frequency noise spectrum; nanomechanical resonators; nanophotonic circuit; phase noise; quality factor; Fluctuations; Optical resonators; Phase noise; Resonant frequency; Silicon; Temperature measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2012 Conference on
  • Conference_Location
    San Jose, CA
  • Print_ISBN
    978-1-4673-1839-6
  • Type

    conf

  • Filename
    6326240
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1668904