Title :
Phase noise of high Q silicon nitride nanomechanical resonators
Author :
Fong, King Y. ; Pernice, Wolfram H P ; Tang, Hong X.
Author_Institution :
Dept. of Electr. Eng., Yale Univ., New Haven, CT, USA
Abstract :
We study noise characteristics of high Q silicon nitride nanomechanical resonators integrated in a nanophotonic circuit. Quality factor up to 2.2 million is measured and an intrinsic frequency noise spectrum with kBT/f dependence is observed.
Keywords :
Q-factor; integrated optics; micromechanical resonators; nanophotonics; optical resonators; phase noise; silicon compounds; SiN; high Q silicon nitride; intrinsic frequency noise spectrum; nanomechanical resonators; nanophotonic circuit; phase noise; quality factor; Fluctuations; Optical resonators; Phase noise; Resonant frequency; Silicon; Temperature measurement;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2012 Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-4673-1839-6
