High frequency characteristics of Fe65Co35 alloy cluster-assembled films prepared by energetic cluster deposition

Size-monodispersed Fe₆₅Co₃₅ alloy clusters whose average sizes ranged between 7 and 12 nm were obtained using a plasma-gas-condensation (PGC)-type cluster deposition apparatus. Positively charged clusters in a cluster beam were accelerated electrically and deposited onto a negatively biased substrate together with neutral clusters from the same cluster source, leading to formation of a high-density Fe₆₅Co₃₅ alloy cluster-assembled films with soft magnetic properties. High frequency magnetic characteristics were studied for these films prepared at room temperature by an energetic cluster deposition with and without O₂ gas addition into a cluster deposition chamber.