Title :
High frequency characteristics of Fe65Co35 alloy cluster-assembled films prepared by energetic cluster deposition
Author :
Peng, Dong-Liang ; Wang, Xuan ; Wang, Lai-Sen ; Chen, Yuanzhi ; Yue, Guang-Hui ; Sumiyama, Kenta ; Hihara, T.
Author_Institution :
Dept. of Mater. Sci. & Eng., Xiamen Univ., Xiamen, China
Abstract :
Size-monodispersed Fe65Co35 alloy clusters whose average sizes ranged between 7 and 12 nm were obtained using a plasma-gas-condensation (PGC)-type cluster deposition apparatus. Positively charged clusters in a cluster beam were accelerated electrically and deposited onto a negatively biased substrate together with neutral clusters from the same cluster source, leading to formation of a high-density Fe65Co35 alloy cluster-assembled films with soft magnetic properties. High frequency magnetic characteristics were studied for these films prepared at room temperature by an energetic cluster deposition with and without O2 gas addition into a cluster deposition chamber.
Keywords :
condensation; copper alloys; disperse systems; iron alloys; magnetic permeability; magnetisation; metal clusters; metallic thin films; plasma deposition; self-assembly; soft magnetic materials; Fe65Co35; alloy cluster-assembled films; cluster deposition chamber; energetic cluster deposition; gas addition; high-frequency magnetic characteristics; in-plane magnetization curves; negatively biased substrate; permeability; plasma-gas-condensation-type cluster deposition apparatus; positively charged clusters; size-monodispersed alloy clusters; soft magnetic property; temperature 293 K to 298 K; Acceleration; Cobalt alloys; Frequency; Iron alloys; Lead; Magnetic films; Particle beams; Plasma accelerators; Plasma properties; Plasma sources;
Conference_Titel :
Nanoelectronics Conference (INEC), 2010 3rd International
Conference_Location :
Hong Kong
Print_ISBN :
978-1-4244-3543-2
Electronic_ISBN :
978-1-4244-3544-9
DOI :
10.1109/INEC.2010.5425001
