Title :
Fe thin film of thickness 90nm produces large horizontal displacement by magnetic torque
Author :
Hsieh, Yi-Ping ; Li, Yun-Jui ; Wei, Zung-Hang ; Lai, Mei-Feng
Author_Institution :
Dept. of Power Mech. Eng., National Tsing Hua Univ., Hsinchu, Taiwan
Abstract :
We have successfully fabricated a silicon oxide micro-cantilever (length 70 um × width 700 nm) with a silicon oxide plate (length 70 um × width 5 um) that combines magnetic membrane, and actuated the micro-cantilever by placing in a applied magnetic field. Our structure of the magnetic membrane is a ellipse of iron (length 50 um × width 1 um × thickness 90 nm). The silicon oxide micro-cantilever with applied magnetic field of 1500 gauss has been horizontally displaced 20 um.
Keywords :
cantilevers; electromagnetic actuators; ferromagnetic materials; iron; magnetic devices; magnetic thin films; membranes; microactuators; microfabrication; silicon compounds; Fe-SiO2; actuation; film thickness; horizontal displacement; iron thin film; magnetic membrane; magnetic torque; silicon oxide microcantilever fabrication; silicon oxide plate; size 1 mum; size 5 mum; size 50 mum; size 70 mum; size 700 nm; size 90 nm; Actuators; Biomembranes; Gaussian processes; Iron; Lifting equipment; Magnetic field measurement; Magnetic fields; Magnetic films; Silicon; Torque;
Conference_Titel :
Nanoelectronics Conference (INEC), 2010 3rd International
Conference_Location :
Hong Kong
Print_ISBN :
978-1-4244-3543-2
Electronic_ISBN :
978-1-4244-3544-9
DOI :
10.1109/INEC.2010.5425015
