Title :
Arrays of micro-fabricated quadrupole mass filters
Author :
Lebel, Larry ; Velasquez-Garcia, Luis F. ; Akinwande, Akintunde I.
Author_Institution :
Microsystems Technol. Labs., MIT, Cambridge, MA, USA
Abstract :
A miniature quadrupole mass filter array is being developed for use in a micro gas analyzer. Both high sensitivity and high resolution are needed over a wide range of ion mass-to-charge ratios, from 20 to 200 atomic mass units per electron charge.
Keywords :
mass spectrometer accessories; micromechanical devices; atomic mass units; electron charge; ion mass-to-charge ratios; microfabricated quadrupole mass filters; microgas analyzer; Atomic measurements; Electrons; Filters; Laboratories; Mass spectroscopy; Micromachining; Silicon; Stability; Steel; Wafer bonding;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2005. IVNC 2005. Technical Digest of the 18th International
Print_ISBN :
0-7803-8397-4
DOI :
10.1109/IVNC.2005.1619638
