• DocumentCode
    1670538
  • Title

    Arrays of micro-fabricated quadrupole mass filters

  • Author

    Lebel, Larry ; Velasquez-Garcia, Luis F. ; Akinwande, Akintunde I.

  • Author_Institution
    Microsystems Technol. Labs., MIT, Cambridge, MA, USA
  • fYear
    2005
  • Firstpage
    366
  • Lastpage
    367
  • Abstract
    A miniature quadrupole mass filter array is being developed for use in a micro gas analyzer. Both high sensitivity and high resolution are needed over a wide range of ion mass-to-charge ratios, from 20 to 200 atomic mass units per electron charge.
  • Keywords
    mass spectrometer accessories; micromechanical devices; atomic mass units; electron charge; ion mass-to-charge ratios; microfabricated quadrupole mass filters; microgas analyzer; Atomic measurements; Electrons; Filters; Laboratories; Mass spectroscopy; Micromachining; Silicon; Stability; Steel; Wafer bonding;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Nanoelectronics Conference, 2005. IVNC 2005. Technical Digest of the 18th International
  • Print_ISBN
    0-7803-8397-4
  • Type

    conf

  • DOI
    10.1109/IVNC.2005.1619638
  • Filename
    1619638
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1670538