• DocumentCode
    1670746
  • Title

    The effects of bi-layer catalysts and its annealing on the growth of GaN nanowires

  • Author

    Kuo, Dong-Hau ; Shen, Wei-Ting

  • Author_Institution
    Dept. of Polymer Eng., Nat. Taiwan Univ. of Sci. & Technol., Taipei, Taiwan
  • fYear
    2010
  • Firstpage
    1064
  • Lastpage
    1065
  • Abstract
    We report an evaporation reaction to synthesize GaN nanowires at 800°C on metallic bi-layer catalyst-coated substrates and on the bi-layer catalyst-annealed substrates through the reaction of GaN and NH3. The annealing temperatures of catalyst layers before the GaN growth were 700°C and 850°C. Bi-layer metallic catalysts were constituted with Au, Ni, Al, and In. The growth differences caused by the stacking sequence of bi-layer catalysts and the annealing conditions were investigated. The understanding of those differences can help to know the growth mechanism.
  • Keywords
    III-V semiconductors; annealing; catalysts; evaporation; gallium compounds; nanowires; semiconductor growth; wide band gap semiconductors; GaN; annealing; bilayer catalyst; evaporation reaction; nanowire growth; stacking sequence; temperature 700 degC; temperature 800 degC; temperature 850 degC; Alloying; Annealing; Carbon nanotubes; Gallium nitride; Gold; Nanowires; Stacking; Substrates; Surface cleaning; Temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanoelectronics Conference (INEC), 2010 3rd International
  • Conference_Location
    Hong Kong
  • Print_ISBN
    978-1-4244-3543-2
  • Electronic_ISBN
    978-1-4244-3544-9
  • Type

    conf

  • DOI
    10.1109/INEC.2010.5425038
  • Filename
    5425038