Title :
A 0.8 mA 50 Hz 15 b SNDR ΔΣ closed-loop 10g accelerometer using an 8th-order digital compensator
Author :
Condemine, C. ; Delorme, N. ; Soen, J. ; Durupt, J. ; Blanc, J.-P. ; Belleville, M. ; Besançon-Voda, A.
Author_Institution :
Electron. & Inf. Technol. Lab., Grenoble, France
Abstract :
A ΣΔ-based closed-loop ±10g accelerometer providing 88 dB SNDR over a 50 Hz bandwidth is fabricated in a 19.4 mm2 die using 0.35 μm CMOS technology. A ΔΣ interface performs the readout, ADC and electrostatic actuation of the sensor, while an 8th-order digital compensator computes the actuation command.
Keywords :
accelerometers; capacitive sensors; compensation; electrostatic actuators; microsensors; sigma-delta modulation; ΣΔ-based closed-loop accelerometer; 0.35 micron; 0.8 mA; 15 bit; 50 Hz; ADC; CMOS technology; SNDR; SNDR ΔΣ closed-loop accelerometer; actuation command computation; bandwidth; capacitive comb accelerometer; eighth-order digital compensator; readout; sensor electrostatic actuation; sigma-delta interface; Accelerometers; Capacitance; Cutoff frequency; Electrodes; Electrostatics; Laboratories; Linearity; Mathematical model; Sampling methods; Voltage;
Conference_Titel :
Solid-State Circuits Conference, 2005. Digest of Technical Papers. ISSCC. 2005 IEEE International
Conference_Location :
San Francisco, CA
Print_ISBN :
0-7803-8904-2
DOI :
10.1109/ISSCC.2005.1493962
