High frequency input impedance characterization of dielectric films for power-ground planes

Broadband impedance characterization of high-k films was performed in the frequency range of 100 MHz to 10 GHz using a coaxial test fixture configuration. The electrical characteristic of high-k films was found to be consistent with a capacitance load, without noticeable contribution from the circuit inductance that typically dominates the high frequency response. An intrinsic high frequency relaxation process was analyzed in high-k organic-ceramic hybrid materials. The resulting dielectric dispersion and the corresponding dielectric loss can suppress the resonant standing waves in power-ground planes.