Title :
Solid-state fabrication of nanostructured AlSb by electron beam heating process
Author :
Wichasilp, Chaned ; Thongtem, Titipun ; Thongtem, Somchai
Author_Institution :
Dept. of Phys. & Mater. Sci., Chiang Mai Univ., Chiang Mai, Thailand
Abstract :
The utility of electron beam heating toward the synthesis of AlSb is reported. The solid-state electron beam heating using different electrical flow for the synthesis of AlSb was studied. The phase and morphologies were characterized using X-ray powder diffraction, and field-emission scanning and transmission electron microscopic techniques, and energy dispersive X-ray analyzer. Their electrical properties were also investigated using four-point probe resistivity measurement.
Keywords :
III-V semiconductors; X-ray chemical analysis; X-ray diffraction; aluminium compounds; electrical resistivity; electron beam effects; heat treatment; nanostructured materials; scanning electron microscopy; transmission electron microscopy; AlSb; X-ray powder diffraction; electrical flow; electron beam heating process; energy dispersive X-ray analyzer; field-emission scanning electron microscopy; four-point probe resistivity measurement; nanostructured materials; solid-state electron beam heating; solid-state fabrication; transmission electron microscopy; Dispersion; Electron beams; Fabrication; Morphology; Powders; Resistance heating; Scanning electron microscopy; Solid state circuits; Transmission electron microscopy; X-ray diffraction;
Conference_Titel :
Nanoelectronics Conference (INEC), 2010 3rd International
Conference_Location :
Hong Kong
Print_ISBN :
978-1-4244-3543-2
Electronic_ISBN :
978-1-4244-3544-9
DOI :
10.1109/INEC.2010.5425066
