Title :
Nanoindentation study on mechanical properties of Zr(C)N films deposited on NiTi shape memory alloy
Author :
Chu, C.L. ; Ji, H.L. ; Guo, C. ; Sheng, X.B. ; Dong, Y.S. ; Lin, P.H. ; Hu, T. ; Chu, P.K.
Author_Institution :
Jiangsu Key Lab. for Adv. Metallic Mater., Southeast Univ., Nanjing, China
Abstract :
Surface nanomechanical properties of ZrN and ZrCN films deposited on NiTi shape memory alloy (SMA) by magnetron sputtering were investigated by nanoindentation study. And their surface deformation mechanism under nanoindentation load was also proposed and discussed by comparison with that of the electropolished NiTi SMA.
Keywords :
deformation; nanoindentation; nickel alloys; sputter deposition; thin films; titanium alloys; zirconium compounds; NiTi; ZrCN; magnetron sputtering; nanoindentation; shape memory alloy; surface deformation; surface nanomechanical properties; thin films; Inorganic materials; Laboratories; Magnetic materials; Materials science and technology; Mechanical factors; Microstructure; Physics; Shape memory alloys; Sputtering; Substrates;
Conference_Titel :
Nanoelectronics Conference (INEC), 2010 3rd International
Conference_Location :
Hong Kong
Print_ISBN :
978-1-4244-3543-2
Electronic_ISBN :
978-1-4244-3544-9
DOI :
10.1109/INEC.2010.5425083
