Title :
Size effects of superelasticity in nanocrystalline NiTi shape memory alloy
Author :
Wang, Fei ; Huang, Ping ; Chen, Wenqiang ; Xu, Kewei
Author_Institution :
MOE Key Lab. for Strength & Vibration, Xian Jiaotong Univ., Xi´´an, China
Abstract :
NiTi shape memory alloy thin film has been received considerable attention because of their application as actuators in micro-and nano-electro-mechanical systems. In this study, the analysis of NiTi shape memory thin film by combining transmission electron microscopy and nanoindentation techniques were carried out elucidating the influence of the grain size and the indentation depth on superelasticity. Partial recovery was observed from the load-depth curves formed by a Berkovich diamond indenter and the depth recovery ratio and the energy recovery ratio at various indentation depth and grain sizes were evaluated. The mechanism behind these observations are explained and extended discussed.
Keywords :
elasticity; grain size; micromechanical devices; nanoelectromechanical devices; nanoindentation; nanostructured materials; nickel alloys; shape memory effects; size effect; thin films; titanium alloys; transmission electron microscopy; Berkovich diamond indenter; NiTi; grain size; microelectromechanical systems; nanocrystalline shape memory alloy; nanoelectromechanical systems; nanoindentation; size effects; superelasticity; thin film; transmission electron microscopy; Actuators; Crystallization; Grain size; Mechanical factors; Micromechanical devices; Nanoelectromechanical systems; Shape memory alloys; Sputtering; Temperature; Transistors;
Conference_Titel :
Nanoelectronics Conference (INEC), 2010 3rd International
Conference_Location :
Hong Kong
Print_ISBN :
978-1-4244-3543-2
Electronic_ISBN :
978-1-4244-3544-9
DOI :
10.1109/INEC.2010.5425085
