Title :
Optical and electrical properties of indium oxide thin films as transparent electrode to indium phosphide
Author :
Hseih, Chunhan ; Ou, Fang ; Yi, Fei ; Ho, Seng-Tiong
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Northwestern Univ., Evanston, IL, USA
Abstract :
We investigate the optical and electrical properties of indium oxide (In2O3) thin films deposited by ion beam assisted deposition (IAD). Results show promising potentials of In2O3 as transparent electrodes for InP based optoelectronic devices.
Keywords :
Hall mobility; indium compounds; infrared spectra; ion beam assisted deposition; thin films; ultraviolet spectra; visible spectra; In2O3; electrical properties; indium phosphide; ion beam assisted deposition; optical properties; optoelectronic devices; thin films; transparent electrode; Contacts; Indium phosphide; Optical attenuators; Optical films; Optical reflection; Optical refraction; Substrates;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2012 Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-4673-1839-6
