Tunable RF and analog circuits using on-chip MEMS passive components

Author

Fedder, G.K. ; Mukherjee, T.

Author_Institution

Carnegie Mellon Univ., Pittsburgh, PA, USA

fYear

2005

Firstpage

390

Abstract

Micromachining in RF foundry processes enhances inductor and capacitor quality factors, increases varactor tuning range, and supports creation of electromechanical mixer-filters that downconvert RF signals from GHz to MHz frequency band with built-in frequency selectivity. An on-chip parallel receiver architecture and circuit blocks incorporating these MEMS devices for low-power operation are presented.

Keywords

UHF frequency convertors; analogue circuits; capacitors; electromechanical filters; inductors; low-power electronics; micromachining; micromechanical devices; radio receivers; radiofrequency integrated circuits; varactors; RF signal downconversion; analog circuits; capacitor quality factors; electromechanical mixer filters; frequency selectivity; inductor quality factors; low-power operation; micromachining; on-chip MEMS passive components; on-chip parallel receiver architecture; tunable RF circuits; varactor tuning range; Analog circuits; Capacitors; Foundries; Inductors; Micromachining; Micromechanical devices; Q factor; Radio frequency; Tunable circuits and devices; Varactors;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Circuits Conference, 2005. Digest of Technical Papers. ISSCC. 2005 IEEE International

Conference_Location

San Francisco, CA

ISSN

0193-6530

Print_ISBN

0-7803-8904-2

Type

conf

DOI

10.1109/ISSCC.2005.1494033

Filename

1494033