Design and development of cantilever-type MEMS based piezoelectric energy harvester

Author

Saxena, Shanky ; Sharma, Ritu ; Pant, B.D.

fYear

2015

Firstpage

1

Lastpage

4

Abstract

Vibration energy harvesting is gaining attention due to abundance of vibration energy at most places and ability to generate power MEMS devices from microwatts to few millwatts. Piezoelectric energy harvesters are the most suitable for vibration energy harvesting due to simplicity in design, operation and fabrication in MEMS technology. Cantilever fixed from one end and seismic mass on the free end is used to harvest energy which is modeled as spring mass damper system responding to a single frequency. Wideband frequency operation for the energy harvester must be ensured so that power is harvested for a range of frequency. In this paper cantilever array with variable length from 2000 μm to 2200 μm is designed and simulated at a boundary load of 1 bar pressure to achieve a wideband frequency operation from 681 Hz to 1215 Hz.

Keywords

cantilevers; design engineering; energy harvesting; micromechanical devices; piezoelectric transducers; shock absorbers; springs (mechanical); vibrations; boundary load; cantilever array; cantilever-type MEMS based piezoelectric energy harvester; power MEMS device generation; seismic mass; spring mass damper system; variable length; vibration energy harvesting; wideband frequency operation; Arrays; Micromechanical devices; Resonant frequency; Springs; Stress; Vibrations; Wideband; MEMS; Piezoelectric energy harvester; seismic mass; wideband frequency;

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Design and Test (VDAT), 2015 19th International Symposium on

Conference_Location

Ahmedabad

Print_ISBN

978-1-4799-1742-6

Type

conf

DOI

10.1109/ISVDAT.2015.7208045

Filename

7208045