Optimized conditions for THz photonic crystal fabrication with excimer laser

Author

Li, Irene Ling ; Huang, Jing Zhen ; Wu, Ye ; Fu, Ling ; Zhai, Jian Pang ; Ruan, Shuang Chen

Author_Institution

Shenzhen Key Lab. of Laser Eng., Shenzhen Univ., Shenzhen, China

fYear

2010

Firstpage

570

Lastpage

571

Abstract

We theoretically and experimentally investigated the fabrication conditions for THz photonic crystals. A THz photonic crystal with complete band gap from 0.33 THz to 0.36 THz has been designed. The substrate is polytetrafluorethylene (PTFE) which is transparent in THz range. The lattice constant is 320 Â¿m, the hole radius is 85Â¿m. An excimer laser with wavelength 248nm is used to realize the structure. According to a series of testing results, the optimized conditions for this THz photonic crystal fabrication have been confirmed. The excimer laser energy is 13 mJ and the pulses number per burst is 120.

Keywords

crystal morphology; excimer lasers; laser beam effects; laser materials processing; lattice constants; micro-optics; microwave photonics; optical fabrication; photonic band gap; photonic crystals; refractive index; transparency; THz photonic crystal fabrication; band gap; energy 13 mJ; excimer laser; frequency 0.33 THz to 0.36 THz; hole radius; laser energy; lattice constant; morphology; polytetrafluorethylene substrate; pulses number per burst; refractive index; size 85 mum; transparency; wavelength 248 nm; Laser modes; Laser theory; Lattices; Optical device fabrication; Optical pulses; Photonic band gap; Photonic crystals; Power lasers; Refractive index; Scanning electron microscopy;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanoelectronics Conference (INEC), 2010 3rd International

Conference_Location

Hong Kong

Print_ISBN

978-1-4244-3543-2

Electronic_ISBN

978-1-4244-3544-9

Type

conf

DOI

10.1109/INEC.2010.5425141

Filename

5425141