DocumentCode
1674849
Title
A feedback limitation of decentralized controllers for TITO systems, with application to a reactive ion etcher
Author
Freudenberg, J.S. ; Grizzle, J.W. ; Rashap, B.A.
Author_Institution
Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA
Volume
3
fYear
1994
Firstpage
2312
Abstract
This paper explores an inherent feedback limitation of using decentralized LTI control on a two-input, two-output LTI plant. The result is motivated by, and illustrated on, a reactive ion etcher
Keywords
MIMO systems; decentralised control; electronics industry; feedback; multivariable control systems; semiconductor device manufacture; sputter etching; MIMO systems; decentralized controllers; feedback limitation; inherent feedback limitation; reactive ion etcher; two-input two-output LTI plant; Actuators; Centralized control; Chemical processes; Computer aided manufacturing; Control systems; Etching; Feedback; Plasma applications; Power system modeling; Semiconductor device noise;
fLanguage
English
Publisher
ieee
Conference_Titel
Decision and Control, 1994., Proceedings of the 33rd IEEE Conference on
Conference_Location
Lake Buena Vista, FL
Print_ISBN
0-7803-1968-0
Type
conf
DOI
10.1109/CDC.1994.411472
Filename
411472
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