A CMOS voltage-to-frequency linearizing preprocessor for parallel plate RF MEMS varactors

Author

McCorquodale, Michael S. ; Ding, Mei Kim ; Brown, Richard B.

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA

fYear

2003

Firstpage

535

Lastpage

538

Abstract

A generalized parallel plate radio frequency microelectromechanical systems (MEMS) varactor is presented and studied. Its application in an RF oscillator is described and the nonlinear relationship between tuning voltage and realized output frequency is derived. A low power CMOS integrated circuit is proposed to linearize the response. The circuit consumes at most 100 μW of power while linearizing the voltage-to-frequency response to a correlation coefficient (R²) of 0.9988. The described circuit and theory can be employed in any application where the nonlinear response associated with parallel plate RF MEMS varactors must be compensated.

Keywords

CMOS analogue integrated circuits; circuit tuning; low-power electronics; micromechanical devices; radiofrequency integrated circuits; 100 muW; CMOS; RF oscillator; correlation coefficient; low power CMOS; nonlinear response; output frequency; parallel plate RF MEMS varactors; tuning voltage; voltage-to-frequency linearizing preprocessor; voltage-to-frequency response; Capacitance; Circuit optimization; Inductors; Micromechanical devices; Radio frequency; Radiofrequency microelectromechanical systems; Tuning; Varactors; Voltage; Voltage-controlled oscillators;

fLanguage

English

Publisher

ieee

Conference_Titel

Radio Frequency Integrated Circuits (RFIC) Symposium, 2003 IEEE

ISSN

1529-2517

Print_ISBN

0-7803-7694-3

Type

conf

DOI

10.1109/RFIC.2003.1214002

Filename

1214002