Title :
Dielectric and semiconductor membranes as support for microwave circuits
Author :
Muller, A. ; Petrini, Ioana ; Marcelli, R. ; Iordanescu, S. ; Avramescu, K. ; Vasilache, Dan
Author_Institution :
Nat. Inst. for Res. Dev. in Microtechnol., Bucharest, Romania
Abstract :
The aim of this paper is to present the manufacturing of thin GaAs and dielectric membranes as support for microwave and millimeter wave circuit elements. The dielectric membranes are realised by anisotropic etching techniques of the ⟨100⟨ silicon substrate. GaAs membranes are obtained by nonselective etching techniques. The paper also presents the manufacturing of interdigitated capacitors, and a band stop filter supported on a thin SiO2/Si3N4 /SiO2 membrane
Keywords :
band-stop filters; capacitors; etching; micromachining; microwave circuits; millimetre wave circuits; GaAs; Si; SiO2-Si3N4-SiO2; anisotropic etching techniques; band stop filter; dielectric membranes; interdigitated capacitors; microwave circuits; millimeter wave circuit; nonselective etching techniques; semiconductor membranes; Anisotropic magnetoresistance; Biomembranes; Dielectric substrates; Etching; Gallium arsenide; Microwave circuits; Millimeter wave circuits; Millimeter wave technology; Pulp manufacturing; Semiconductor device manufacture;
Conference_Titel :
Electrotechnical Conference, 1998. MELECON 98., 9th Mediterranean
Conference_Location :
Tel-Aviv
Print_ISBN :
0-7803-3879-0
DOI :
10.1109/MELCON.1998.692439
