Dielectric and semiconductor membranes as support for microwave circuits

Author

Muller, A. ; Petrini, Ioana ; Marcelli, R. ; Iordanescu, S. ; Avramescu, K. ; Vasilache, Dan

Author_Institution

Nat. Inst. for Res. Dev. in Microtechnol., Bucharest, Romania

Volume

1

fYear

1998

Firstpage

387

Abstract

The aim of this paper is to present the manufacturing of thin GaAs and dielectric membranes as support for microwave and millimeter wave circuit elements. The dielectric membranes are realised by anisotropic etching techniques of the ⟨100⟨ silicon substrate. GaAs membranes are obtained by nonselective etching techniques. The paper also presents the manufacturing of interdigitated capacitors, and a band stop filter supported on a thin SiO₂/Si₃N₄/SiO₂ membrane

Keywords

band-stop filters; capacitors; etching; micromachining; microwave circuits; millimetre wave circuits; GaAs; Si; SiO₂-Si₃N₄-SiO₂; anisotropic etching techniques; band stop filter; dielectric membranes; interdigitated capacitors; microwave circuits; millimeter wave circuit; nonselective etching techniques; semiconductor membranes; Anisotropic magnetoresistance; Biomembranes; Dielectric substrates; Etching; Gallium arsenide; Microwave circuits; Millimeter wave circuits; Millimeter wave technology; Pulp manufacturing; Semiconductor device manufacture;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrotechnical Conference, 1998. MELECON 98., 9th Mediterranean

Conference_Location

Tel-Aviv

Print_ISBN

0-7803-3879-0

Type

conf

DOI

10.1109/MELCON.1998.692439

Filename

692439