• DocumentCode
    1677984
  • Title

    High Charge State Metal Ion Production In Vacuum Arc Ion Sources

  • Author

    Brown, I.G. ; Anders, Andre ; Anders, Solveig

  • Author_Institution
    Lawrence Berkeley Laboratory
  • fYear
    1994
  • Firstpage
    84
  • Lastpage
    84
  • Keywords
    Boron; Cathodes; Ion implantation; Ion sources; Plasma applications; Plasma immersion ion implantation; Plasma materials processing; Plasma sources; Production; Vacuum arcs;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
  • Conference_Location
    Santa Fe, NM, USA
  • ISSN
    0730-9244
  • Print_ISBN
    0-7803-2006-9
  • Type

    conf

  • DOI
    10.1109/PLASMA.1994.588704
  • Filename
    588704
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1677984