Title :
3D microstructures integrated with optical waveguides and photodiodes on silicon
Author :
Muller, Raluca ; Pavelescu, Ioan ; Manea, Elena
Author_Institution :
Nat. Inst. for Res. & Dev. in Microtechnol., Bucharest, Romania
Abstract :
This paper reports experimental realization of 3D microstructures (cantilevers) integrated with optical waveguides and photodiodes on silicon, in order to obtain opto-electro-mechanical microsystems. The freestanding structures were released by anisotropic front side etching in KOH solutions and consist of a SiO2/SiON/SiO2 sandwich, with excellent mechanical properties. The fabrication of micromechanical and microoptical elements is compatible with the materials and processes used in conventional IC technology
Keywords :
etching; micro-optics; micromachining; micromechanical resonators; microsensors; optical planar waveguides; photodiodes; silicon compounds; 3D microstructures; SiO2-SiON-SiO2; anisotropic front side etching; cantilevers; freestanding structures; micromechanical elements; microoptical elements; optical waveguides; opto-electro-mechanical microsystems; photodiodes; Anisotropic magnetoresistance; Etching; Geometrical optics; Integrated optics; Mechanical factors; Microstructure; Optical device fabrication; Optical waveguides; Photodiodes; Silicon;
Conference_Titel :
Electrotechnical Conference, 1998. MELECON 98., 9th Mediterranean
Conference_Location :
Tel-Aviv
Print_ISBN :
0-7803-3879-0
DOI :
10.1109/MELCON.1998.692441
