DocumentCode

1678519

Title

Inductively Coupled Plasma And Ion Sources: History And State-of-the-art

Author

Hopwood, Jeffrey

Author_Institution

Northeastern University

fYear

1994

Firstpage

84

Lastpage

85

Keywords

Coils; Electromagnetic coupling; History; Ion sources; Optical coupling; Plasma applications; Plasma density; Plasma properties; Plasma sources; Power generation;

fLanguage

English

Publisher

ieee

Conference_Titel

Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on

Conference_Location

Santa Fe, NM, USA

ISSN

0730-9244

Print_ISBN

0-7803-2006-9

Type

conf

DOI

10.1109/PLASMA.1994.588706

Filename

588706