New type of piezoelectric pump with built-in self test

This paper presents a built-in self test pump actuated by piezoelectric bimorphs for fluidic systems. The sensor fabricated by MEMS ensures the flow to be 0.5μ l/s. There are two piezoelectric vibrators in the pump and the check valve is metal cantilever beam. The pump is characterized by integrated structure, flow with built-in self test, wide frequency response, etc. The size of the piezoelectric pump with built-in self test is 30mm, 30mm and 16mm, which is fabricated by precise manufacturing. The high-speed micro processor is used to run the algorithmic program and control the pump with self test. Experiments show that the fuzzy control is fitted for the flow control system. With the appropriate fuzzy rules, the new type of piezoelectric pump can achieve the precision of 0.5μ l/s.