The Development of an Ultra-precision Dual-stage Based on a Master-Slave Control System

A ultra-precision dual-stage based on a master-slave control mode is presented to meet the demand for nanometer level accuracy in this paper. The dual-stage is constructed with a linear motor and a Lorentz motor. By adopting the air bearing, both linear motor and Lorentz motor are regarded as a double differential system respectively. The coupling system of two stages has been decoupled. The "PID + feedforward" control structure is adopted. Nanometer level positioning accuracy and high moving speed are achieved. The experimental results are provided.