DocumentCode
1679594
Title
Ecr Ion/free-radical Plasma Source Simulation In Two And Three Dimensions
Author
Gopinath, V. ; Grotjohn, T.A.
Author_Institution
Michigan State University
fYear
1994
Firstpage
86
Lastpage
86
Keywords
Breakdown voltage; Electromagnetic fields; Electromagnetic modeling; Electrons; Fault location; Numerical models; Partial discharges; Plasma applications; Plasma simulation; Plasma sources;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location
Santa Fe, NM, USA
ISSN
0730-9244
Print_ISBN
0-7803-2006-9
Type
conf
DOI
10.1109/PLASMA.1994.588710
Filename
588710
Link To Document