Title :
Robust Inductor Design for RF Circuits
Author :
Lu, Yin-Lung Ryan ; Lee, Yung-Huei ; McMahon, William J. ; Fung, Tze-Ching
Author_Institution :
Intel Corp., Santa Clara, CA
Abstract :
Design of monolithic spiral inductors with electromigration (EM) robustness has been demonstrated. By adding small metal reservoir structures in the underpass area, inductor EM lifetime can be significantly improved. Measurements showed that the metal reservoir structures do not have an impact on inductor Q and inductance. Adding these structures hence allows more aggressive and scalable RF IC design
Keywords :
electromigration; inductors; integrated circuit design; radiofrequency integrated circuits; RF circuits; electromigration robustness; monolithic spiral inductors; robust inductor design; Degradation; Electromigration; Inductors; Radio frequency; Radiofrequency integrated circuits; Reservoirs; Robustness; Spirals; Stress; Voltage-controlled oscillators;
Conference_Titel :
Custom Integrated Circuits Conference, 2006. CICC '06. IEEE
Conference_Location :
San Jose, CA
Print_ISBN :
1-4244-0075-9
Electronic_ISBN :
1-4244-0076-7
DOI :
10.1109/CICC.2006.320993
