The Testing System of Microarea Sheet Resistance Based on Labview with Inclined Square Four Point Probes

This article briefly elaborated the basic concepts of the probe vacillated at testing a large silicon wafer with square four probe measurement technology are analyzed. Some factors that affect the measurement accuracy are studied, and interference can be avoided while measuring and analyzing the influences of square four point probe measurement by probe vacillate. The article introduces how to obtain the measurement result by means of Lab view technology about the micro area in testing system of square four point probes inclined. This system utilizes a hardware mode of DAQ and a software mode of module, Lab view can control the testing instrument, and realize real time track of parameter, analysis and handle the testing data. The testing method has been verified through experiment data.