Title :
Novel target holder for RF sputtering systems
Author :
Axelevitch, A. ; Rabinovitch, E. ; Golan, G.
Author_Institution :
Center for Technol. Educ., Holon, Israel
Abstract :
A novel target-holder construction for sputtering machines was developed and found to be most useful and effective for multi-target processes. The main advantages of this target holder are that it guarantees a good contact between the target material and the water cooled surface of the target-holder, it enables a quick target replacement, it provides a shielding protection against the rest of the non operative areas of the target holder and it improves the sputtering machine maintenance process
Keywords :
sputter deposition; RF sputtering machine; contact; maintenance; multi-target process; replacement; shielding protection; target holder; water cooled surface; Cooling; Diodes; Educational technology; Fasteners; Flanges; Protection; Radio frequency; Space technology; Sputtering; Substrates;
Conference_Titel :
Electrical and Electronics Engineers in Israel, 1996., Nineteenth Convention of
Conference_Location :
Jerusalem
Print_ISBN :
0-7803-3330-6
DOI :
10.1109/EEIS.1996.567014
