Fluid-structure coupling analysis of ultrasonic traveling wave micro-fluid driving annular model

Microfluid driving and controlling technique has become one of the research hotspots of MEMS technique. A new model was presented on the principle of ultrasonic traveling wave driving. Finite element model was developed to predict the fluid flow state. Firstly, by modal analysis and transient dynamics analysis, vibrating modes and transient response of the structure model were obtained respectively. Then the model was modified to perform acoustic-structure coupling analysis to get vibrating modes of the coupling model. On that basis, the transient dynamics analysis of the fluid-structure coupling model was completed and the flow state of the fluid was derived. Simulation results show that the fluid flow appears in the direction of the wave propagation and the feasibility of ultrasonic traveling wave driving is verified.