Title :
Ring Oscillator Performance and Parasitic Extraction Simulation in Finfet Technology
Author :
Kulkarni, Mak ; Marshall, Andrew ; Cleavelin, C. Rinn ; Xiong, Weize ; Pacha, Christian ; von Armin, K. ; Schulz, Thomas ; Schruefer, Klaus ; Patruno, Paul
Author_Institution :
Texas Instruments Inc., Dallas, TX
Abstract :
Correlation of a full parasitic extracted simulation using StarRC and SPICE to silicon is demonstrated for fully depleted (FD) FinFET silicon-on-insulator ring oscillators. The results indicate similar accuracy can be expected as obtained from bulk simulations. This is important in integrated circuit development, as the accurate simulation of circuit performance is imperative to IC development
Keywords :
MOSFET; SPICE; circuit simulation; oscillators; silicon-on-insulator; FinFET; SPICE; Si; StarRC; integrated circuit development; parasitic extraction simulation; silicon-on-insulator ring oscillator; Circuit simulation; Contacts; Etching; FinFETs; Integrated circuit interconnections; Inverters; MOS devices; Ring oscillators; Semiconductor films; Silicon;
Conference_Titel :
Design, Applications, Integration and Software, 2006 IEEE Dallas/CAS Workshop on
Conference_Location :
Richardson, TX
Print_ISBN :
1-4244-0670-6
Electronic_ISBN :
1-4244-0670-6
DOI :
10.1109/DCAS.2006.321049
