DocumentCode
1683338
Title
Ge Photodetectors Integrated with Waveguides for Electronic-Photonic Integrated Circuits on CMOS Platform
Author
Ahn, Donghwan ; Hong, Ching-Yin ; Liu, Jifeng ; Beals, Mark ; Chen, Jian ; Kaertner, Franz X. ; Kimerling, Lionel C. ; Michel, Jurgen
Author_Institution
Dept. of Mater. Sci. & Eng., Massachusetts Inst. of Technol., Cambridge, MA
fYear
2007
Firstpage
1
Lastpage
3
Abstract
Ge p-i-n photodetectors monolithically integrated with silicon oxynitride and silicon nitride waveguides on Si CMOS platform are presented. The devices demonstrated high efficiency (~1.08 A/W) and high-speed (>14 Gbit/s) performances at low bias.
Keywords
CMOS integrated circuits; germanium; integrated optoelectronics; photodetectors; silicon; CMOS; electronic-photonic integrated circuits; p-i-n photodetectors; silicon nitride waveguides; silicon oxynitride; CMOS integrated circuits; High speed optical techniques; Leakage current; Optical films; Optical receivers; Optical waveguides; Photoconductivity; Photodetectors; Semiconductor films; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical Fiber Communication and the National Fiber Optic Engineers Conference, 2007. OFC/NFOEC 2007. Conference on
Conference_Location
Anaheim, CA
Print_ISBN
1-55752-831-4
Type
conf
DOI
10.1109/OFC.2007.4348675
Filename
4348675
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