Title :
Ge Photodetectors Integrated with Waveguides for Electronic-Photonic Integrated Circuits on CMOS Platform
Author :
Ahn, Donghwan ; Hong, Ching-Yin ; Liu, Jifeng ; Beals, Mark ; Chen, Jian ; Kaertner, Franz X. ; Kimerling, Lionel C. ; Michel, Jurgen
Author_Institution :
Dept. of Mater. Sci. & Eng., Massachusetts Inst. of Technol., Cambridge, MA
Abstract :
Ge p-i-n photodetectors monolithically integrated with silicon oxynitride and silicon nitride waveguides on Si CMOS platform are presented. The devices demonstrated high efficiency (~1.08 A/W) and high-speed (>14 Gbit/s) performances at low bias.
Keywords :
CMOS integrated circuits; germanium; integrated optoelectronics; photodetectors; silicon; CMOS; electronic-photonic integrated circuits; p-i-n photodetectors; silicon nitride waveguides; silicon oxynitride; CMOS integrated circuits; High speed optical techniques; Leakage current; Optical films; Optical receivers; Optical waveguides; Photoconductivity; Photodetectors; Semiconductor films; Silicon;
Conference_Titel :
Optical Fiber Communication and the National Fiber Optic Engineers Conference, 2007. OFC/NFOEC 2007. Conference on
Conference_Location :
Anaheim, CA
Print_ISBN :
1-55752-831-4
DOI :
10.1109/OFC.2007.4348675
