DocumentCode :
1683687
Title :
Computer Simulation Of Ion Implantation
Author :
Amin, Adnan ; Kim, Hyun-Suk ; Yi, Sang-Hwa ; Lonngren, K.E. ; Alexeff, I.
Author_Institution :
University ofTennessee
fYear :
1994
Firstpage :
92
Lastpage :
92
Keywords :
Application software; Computer simulation; Electrons; Ion implantation; Plasma applications; Plasma immersion ion implantation; Plasma materials processing; Plasma sheaths; Plasma simulation;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location :
Santa Fe, NM, USA
ISSN :
0730-9244
Print_ISBN :
0-7803-2006-9
Type :
conf
DOI :
10.1109/PLASMA.1994.588732
Filename :
588732
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1683687
بازگشت