• DocumentCode
    1683739
  • Title

    Experimental Study Of Sheaths During Plasma Ion Implantation

  • Author

    Laroussi, Mounir ; Kamath, Sanmati ; Roth

  • Author_Institution
    University of Tennessee
  • fYear
    1994
  • Firstpage
    93
  • Lastpage
    93
  • Keywords
    Ion beams; Ion implantation; Laboratories; Nitrogen; Nuclear and plasma sciences; Plasma immersion ion implantation; Plasma materials processing; Plasma properties; Plasma sheaths; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
  • Conference_Location
    Santa Fe, NM, USA
  • ISSN
    0730-9244
  • Print_ISBN
    0-7803-2006-9
  • Type

    conf

  • DOI
    10.1109/PLASMA.1994.588735
  • Filename
    588735
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1683739