Title :
Experimental Study Of Sheaths During Plasma Ion Implantation
Author :
Laroussi, Mounir ; Kamath, Sanmati ; Roth
Author_Institution :
University of Tennessee
Keywords :
Ion beams; Ion implantation; Laboratories; Nitrogen; Nuclear and plasma sciences; Plasma immersion ion implantation; Plasma materials processing; Plasma properties; Plasma sheaths; Voltage;
Conference_Titel :
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location :
Santa Fe, NM, USA
Print_ISBN :
0-7803-2006-9
DOI :
10.1109/PLASMA.1994.588735
