Title :
A Novel Technique For Semiconductor Thin Film Growth
Author :
Tobin, J.A. ; Tuszewski, M. ; Campbell, I.H. ; Scheuer, J.T.
Author_Institution :
Los Alamos National Laboratory
Keywords :
Fabrication; Laboratories; Plasma density; Plasma measurements; Plasma sources; Plasma temperature; Semiconductor films; Semiconductor thin films; Throughput; Ultra large scale integration;
Conference_Titel :
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location :
Santa Fe, NM, USA
Print_ISBN :
0-7803-2006-9
DOI :
10.1109/PLASMA.1994.588741
