DocumentCode
1683956
Title
Fluid PIC Simulation Of Plasma Processing Devices
Author
Lapenta, G. ; Brackbill, J.U.
Author_Institution
University of California
fYear
1994
Firstpage
95
Lastpage
96
Keywords
Apertures; Electrons; Helical antennas; Inductors; Plasma applications; Plasma density; Plasma devices; Plasma materials processing; Plasma measurements; Plasma simulation;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location
Santa Fe, NM, USA
ISSN
0730-9244
Print_ISBN
0-7803-2006-9
Type
conf
DOI
10.1109/PLASMA.1994.588745
Filename
588745
Link To Document