Title :
Analytic Modeling Of Power Deposition In Inductive Sources
Author :
Vahedi, V. ; DiPeso, G. ; Lieberrnan, M.A. ; Hewett, D.
Author_Institution :
Lawrence Livermore National Laboratory,
Keywords :
Coils; Coupled mode analysis; Electrons; Etching; Inductors; Plasma applications; Plasma density; Plasma simulation; Plasma sources; Radio frequency;
Conference_Titel :
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location :
Santa Fe, NM, USA
Print_ISBN :
0-7803-2006-9
DOI :
10.1109/PLASMA.1994.588786
