Analytic Modeling Of Power Deposition In Inductive Sources

Author

Vahedi, V. ; DiPeso, G. ; Lieberrnan, M.A. ; Hewett, D.

Author_Institution

Lawrence Livermore National Laboratory,

fYear

1994

Firstpage

108

Lastpage

108

Keywords

Coils; Coupled mode analysis; Electrons; Etching; Inductors; Plasma applications; Plasma density; Plasma simulation; Plasma sources; Radio frequency;

fLanguage

English

Publisher

ieee

Conference_Titel

Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on

Conference_Location

Santa Fe, NM, USA

ISSN

0730-9244

Print_ISBN

0-7803-2006-9

Type

DOI

10.1109/PLASMA.1994.588786

Filename

588786

Link To Document