Title :
Radical And Ion Flux Uniformity In A L,ow Pressure Inductively Coupled Plasma Reactor Predicted By Direct Simulation Monte Carlo Method
Author :
Bartel, T. ; Payne, James ; Sterk, T. ; Wise, R. ; Lymberopoulos, Dimitrios ; Econornou, D.
Author_Institution :
Sandia National Laboratories,
Keywords :
Circuit simulation; Computational geometry; Coupling circuits; Damping; Fabrication; Inductors; Plasma density; Plasma simulation; Plasma sources; Predictive models;
Conference_Titel :
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location :
Santa Fe, NM, USA
Print_ISBN :
0-7803-2006-9
DOI :
10.1109/PLASMA.1994.588787
