DocumentCode
1684872
Title
Radical And Ion Flux Uniformity In A L,ow Pressure Inductively Coupled Plasma Reactor Predicted By Direct Simulation Monte Carlo Method
Author
Bartel, T. ; Payne, James ; Sterk, T. ; Wise, R. ; Lymberopoulos, Dimitrios ; Econornou, D.
Author_Institution
Sandia National Laboratories,
fYear
1994
Firstpage
108
Lastpage
108
Keywords
Circuit simulation; Computational geometry; Coupling circuits; Damping; Fabrication; Inductors; Plasma density; Plasma simulation; Plasma sources; Predictive models;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location
Santa Fe, NM, USA
ISSN
0730-9244
Print_ISBN
0-7803-2006-9
Type
conf
DOI
10.1109/PLASMA.1994.588787
Filename
588787
Link To Document