Title :
Effects Of EM Modes To 2D Landau Damping In Inductively Coupled Plasma Sources And Optimal Geometry Design Of Reactors For Exciting Appropriate Modes
Author :
Chwan-Hwa Wu ; Fa Dai
Author_Institution :
Auburn University,
Keywords :
Damping; Etching; Geometry; Inductors; Nuclear and plasma sciences; Plasma applications; Plasma density; Plasma materials processing; Plasma measurements; Plasma sources;
Conference_Titel :
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location :
Santa Fe, NM, USA
Print_ISBN :
0-7803-2006-9
DOI :
10.1109/PLASMA.1994.588788
