Title :
FTIR spectroscopy Measurements 0f CF/sub 4/ and C/sub 2/ F/sub 6/ concentrations In a planar rf Inductively-coupled Plasma
Author :
Mahoney, L.J. ; Yulke, S.G. ; Shohet, J.L. ; Goeckner, M.J.
Author_Institution :
University of Wisconsin
Keywords :
Discharges; Feeds; Fluid flow; Polyethylene; Radio frequency; Spectroscopy;
Conference_Titel :
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location :
Santa Fe, NM, USA
Print_ISBN :
0-7803-2006-9
DOI :
10.1109/PLASMA.1994.588790
