Title :
Statistical models of an ion energy, ion density and neutral species temparare in a multipolar ECR Argon-SF/sub 6/ discharge
Author :
King, G.L. ; Grotjohn, Timothy A.
Author_Institution :
Michigan State University
Keywords :
Argon; Chemical processes; Feeds; Inductors; Plasma applications; Plasma chemistry; Plasma diagnostics; Plasma materials processing; Plasma measurements; Sputter etching;
Conference_Titel :
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location :
Santa Fe, NM, USA
Print_ISBN :
0-7803-2006-9
DOI :
10.1109/PLASMA.1994.588791
