Title :
Diagnostic Characterization And Theoretical Modeling Of Ecr Plasmas
Author :
Douglass, S.R. ; Weber, B.V. ; Eddy, C.R. ; Lampe, M. ; Joyce, G. ; Manheimer, W.
Author_Institution :
Naval Research Laboratory
Keywords :
Coils; Inductors; Magnetic field measurement; Microwave measurements; Plasma chemistry; Plasma diagnostics; Plasma materials processing; Plasma measurements; Plasma properties; Probes;
Conference_Titel :
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location :
Santa Fe, NM, USA
Print_ISBN :
0-7803-2006-9
DOI :
10.1109/PLASMA.1994.588794
