Title :
Pressure Dependence Of He rf Discharges
Author :
Kimura, T. ; Ohe, K.
Author_Institution :
Nagoya Institute of Technology,
Keywords :
Electric variables measurement; Electrons; Heating; Helium; Plasma measurements; Power dissipation; Power engineering and energy; Pressure measurement; Radio frequency; Systems engineering and theory;
Conference_Titel :
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location :
Santa Fe, NM, USA
Print_ISBN :
0-7803-2006-9
DOI :
10.1109/PLASMA.1994.588839
