Title :
Multilayer 3-D Photonics in Silicon
Author :
Koonath, Prakash ; Jalali, Bahram
Author_Institution :
California Univ., Los Angeles
Abstract :
Three-dimensionally integrated devices have been realized in silicon using SIMOX 3D sculpting. Devices are fabricated, for the first time, on three vertically-integrated silicon layers, paving the way towards ultra-dense opto-electronic structures in silicon.
Keywords :
elemental semiconductors; integrated optoelectronics; optical materials; optical multilayers; silicon; SIMOX 3D sculpting; Si; Si - Interface; multilayer 3D photonics; silicon; ultra-dense opto-electronic structures; vertically-integrated silicon layers; Annealing; Integrated optics; Nonhomogeneous media; Optical devices; Optical interconnections; Optical surface waves; Oxygen; Photonics; Silicon; Substrates;
Conference_Titel :
Optical Fiber Communication and the National Fiber Optic Engineers Conference, 2007. OFC/NFOEC 2007. Conference on
Conference_Location :
Anaheim, CA
Print_ISBN :
1-55752-831-4
DOI :
10.1109/OFC.2007.4348776
