• DocumentCode
    1686022
  • Title

    Multilayer 3-D Photonics in Silicon

  • Author

    Koonath, Prakash ; Jalali, Bahram

  • Author_Institution
    California Univ., Los Angeles
  • fYear
    2007
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    Three-dimensionally integrated devices have been realized in silicon using SIMOX 3D sculpting. Devices are fabricated, for the first time, on three vertically-integrated silicon layers, paving the way towards ultra-dense opto-electronic structures in silicon.
  • Keywords
    elemental semiconductors; integrated optoelectronics; optical materials; optical multilayers; silicon; SIMOX 3D sculpting; Si; Si - Interface; multilayer 3D photonics; silicon; ultra-dense opto-electronic structures; vertically-integrated silicon layers; Annealing; Integrated optics; Nonhomogeneous media; Optical devices; Optical interconnections; Optical surface waves; Oxygen; Photonics; Silicon; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical Fiber Communication and the National Fiber Optic Engineers Conference, 2007. OFC/NFOEC 2007. Conference on
  • Conference_Location
    Anaheim, CA
  • Print_ISBN
    1-55752-831-4
  • Type

    conf

  • DOI
    10.1109/OFC.2007.4348776
  • Filename
    4348776
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1686022