Characteristics Of An Inductively Coupled Rf Discharge

Author

Mccoll, W. ; Coonan, B. ; Hopkins, Michael ; Turner, Mark

Author_Institution

Dublin City University,

fYear

1994

Firstpage

127

Lastpage

127

Keywords

Cathodes; Electric breakdown; Electrodes; Electron beams; Fault location; Heating; Ionization; Plasma measurements; Probes; Radio frequency;

fLanguage

English

Publisher

ieee

Conference_Titel

Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on

Conference_Location

Santa Fe, NM, USA

ISSN

0730-9244

Print_ISBN

0-7803-2006-9

Type

DOI

10.1109/PLASMA.1994.588853

Filename

588853

Link To Document