Title :
A study on microbolometer electro-thermal circuit modelling
Author :
Nazdrowicz, Jacek ; Szermer, Michal ; Maj, Cezary ; Zabierowski, Wojciech ; Napieralski, Andrzej
Author_Institution :
Dept. of Microelectron. & Comput. Sci., Lodz Univ. of Technol., Lodz, Poland
Abstract :
Electro-thermal models are commonly used in simulations and designing MEMS devices, also in case of microbolometers. These models allow to estimate sensors performance before fabrication that consequently impacts on fabrication cost. Coupling of electric and thermal domains and building appropriate model for carrying out simulations are crucial to detect all phenomena having impact for Readout Integrated Circuit. This article brings closer to the subject matter of circuit modelling (willingly implemented in MATLAB/SIMULINK or PSPICE tools) and to its theoretical background.
Keywords :
bolometers; integrated circuit modelling; micromechanical devices; readout electronics; MATLAB/SIMULINK implementation; MEMS devices; PSPICE tools; electrothermal circuit modelling; microbolometers; readout integrated circuit; Detectors; Heating; Integrated circuit modeling; Noise; Thermal conductivity; Thermal resistance; circuit modelling; electrothermal modelling; microbolometer;
Conference_Titel :
Mixed Design of Integrated Circuits & Systems (MIXDES), 2015 22nd International Conference
Conference_Location :
Torun
Print_ISBN :
978-8-3635-7806-0
DOI :
10.1109/MIXDES.2015.7208563
