Title :
Neon Dense Plasma Focus Point X-ray Source For /spl les/ 0.25 /spl mu/m lithography
Author :
Prasad, R. Raghu ; Krishnan, Mohan ; Berg, K. ; Conlon, D. ; Mangano, J.
Author_Institution :
Science Research Laboratory
Keywords :
Fault location; Lithography; Nuclear and plasma sciences; Plasma accelerators; Plasma density; Plasma displays; Plasma measurements; Plasma sources; Plasma x-ray sources; Resists;
Conference_Titel :
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location :
Santa Fe, NM, USA
Print_ISBN :
0-7803-2006-9
DOI :
10.1109/PLASMA.1994.588868
