DocumentCode
1686544
Title
Neon Dense Plasma Focus Point X-ray Source For /spl les/ 0.25 /spl mu/m lithography
Author
Prasad, R. Raghu ; Krishnan, Mohan ; Berg, K. ; Conlon, D. ; Mangano, J.
Author_Institution
Science Research Laboratory
fYear
1994
Firstpage
132
Lastpage
132
Keywords
Fault location; Lithography; Nuclear and plasma sciences; Plasma accelerators; Plasma density; Plasma displays; Plasma measurements; Plasma sources; Plasma x-ray sources; Resists;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location
Santa Fe, NM, USA
ISSN
0730-9244
Print_ISBN
0-7803-2006-9
Type
conf
DOI
10.1109/PLASMA.1994.588868
Filename
588868
Link To Document