Title :
Measurement Of Two Dimensional Velocity Distributions Of Ions In A Plasma Chamber
Author :
Hancock, G. ; Lanyi, L. ; Woodcock, B.K.
Author_Institution :
University of Oxford,
Keywords :
Etching; Inductors; Laser transitions; Plasma applications; Plasma chemistry; Plasma measurements; Plasma temperature; Pump lasers; Stimulated emission; Velocity measurement;
Conference_Titel :
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location :
Santa Fe, NM, USA
Print_ISBN :
0-7803-2006-9
DOI :
10.1109/PLASMA.1994.588877
