Title :
Two-dimensional Kinetic And Fluid Models For Parallel-plate Rf Glow Discharges
Author :
Chwar-Hwa Wu ; Xing Wu ; Fongray Frank Young ; Chihwen Li
Author_Institution :
Auburn University
Keywords :
Agricultural engineering; Concurrent computing; Electrons; Geometry; Glow discharges; Inductors; Ionization; Kinetic theory; Poisson equations; Radio frequency;
Conference_Titel :
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location :
Santa Fe, NM, USA
Print_ISBN :
0-7803-2006-9
DOI :
10.1109/PLASMA.1994.588881
