• DocumentCode
    1686921
  • Title

    Two-dimensional Kinetic And Fluid Models For Parallel-plate Rf Glow Discharges

  • Author

    Chwar-Hwa Wu ; Xing Wu ; Fongray Frank Young ; Chihwen Li

  • Author_Institution
    Auburn University
  • fYear
    1994
  • Firstpage
    136
  • Lastpage
    136
  • Keywords
    Agricultural engineering; Concurrent computing; Electrons; Geometry; Glow discharges; Inductors; Ionization; Kinetic theory; Poisson equations; Radio frequency;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
  • Conference_Location
    Santa Fe, NM, USA
  • ISSN
    0730-9244
  • Print_ISBN
    0-7803-2006-9
  • Type

    conf

  • DOI
    10.1109/PLASMA.1994.588881
  • Filename
    588881