Title :
Energy Distributions Of Positive Ions At The Grounded Elect Rode Of A Radio-frequent Y Glow Discharge In Hydrogen
Author :
Radovanov, S.B. ; Olthoff, J.K. ; Van Brunt, R.J. ; Sobolewskl, M.A.
Author_Institution :
National Institute of Standards and Technology,
Keywords :
Current measurement; Electrodes; Electrostatic measurements; Energy measurement; Hydrogen; Plasma chemistry; Plasma density; Plasma measurements; Plasma waves; Radio frequency;
Conference_Titel :
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location :
Santa Fe, NM, USA
Print_ISBN :
0-7803-2006-9
DOI :
10.1109/PLASMA.1994.588882
