Title :
Non-local Electron Kinetics In An Inductively Coupled Rf Discharge
Author_Institution :
Univ. Wisconsin
Keywords :
Electrons; Kinetic theory; Plasma accelerators; Plasma density; Plasma materials processing; Plasma measurements; Plasma sources; Radio frequency; Spectroscopy; Switches;
Conference_Titel :
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location :
Santa Fe, NM, USA
Print_ISBN :
0-7803-2006-9
DOI :
10.1109/PLASMA.1994.588887
