Title :
Surface analysis using multiple coherent beams
Author :
Friedmann, Michael ; Piestun, Rafael ; Paquet, Eric ; Shamir, Joseph
Author_Institution :
Dept. of Electr. Eng., Technion-Israel Inst. of Technol., Haifa, Israel
Abstract :
This work presents an optical method for surface investigation based on the illumination of the surface by focused beams and the sampling of the far field. Each measurement is a coefficient of the multi-beam expansion. The set of coefficients can be used to fully reconstruct the surface. Particular multi-beam expansions, the Gabor, wavelet, wavelet-packet and random expansions, are discussed
Keywords :
Fourier transform optics; image reconstruction; image resolution; image sampling; measurement by laser beam; optical focusing; surface reconstruction; surface topography measurement; wavelet transforms; Fourier domain; Gabor expansion; far field sampling; focused beams; multi-beam expansion; multiple coherent beams; optical method; random expansion; surface analysis; surface illumination; surface reconstruction; wavelet expansion; wavelet-packet expansion; Focusing; Laser beams; Molecular beam epitaxial growth; Optical diffraction; Optical microscopy; Optical surface waves; Space technology; Surface reconstruction; Surface waves; Wavelet packets;
Conference_Titel :
Electrical and Electronics Engineers in Israel, 1996., Nineteenth Convention of
Conference_Location :
Jerusalem
Print_ISBN :
0-7803-3330-6
DOI :
10.1109/EEIS.1996.567034
