Title :
Silicon nitride microclips for optic fibre connectors
Author :
Moore, David ; Townsend, J.E.
Author_Institution :
Dept. of Eng., Cambridge Univ.
fDate :
6/21/1905 12:00:00 AM
Abstract :
Microengineering technologies are being rapidly applied to make precise connections between optical components and fibres, and between fibres. Anisotropic etching of silicon enables the accurate fabrication of V-shaped grooves to locate optic fibres. Single mode fibres can be positioned using microfabricated clips 3 micron thick with a clipping force of 10 Nm-1. This demountable technology enables low cost assembly without the need for active alignment
Keywords :
silicon compounds; 3 micron; Si; V-shaped grooves; anisotropic etching; clipping force; demountable technology; low cost assembly; microengineering technologies; microfabricated clips; optical components; optical fibre connectors; optical fibres; precise connections; silicon nitride microclips; single mode fibre positioning;
Conference_Titel :
Microengineering in Optics and Optoelectronics (Ref. No. 1999/187), IEE Colloquium on
Conference_Location :
London
DOI :
10.1049/ic:19990864
